Semiconductors
Ultra-precision optics and zero-expansion (Zerodur) reference flats for lithography equipment and high-speed wafer inspection systems.
Lithography and wafer inspection tools measure in nanometres, so every optic in the beam path has to hold its form under thermal load and continuous duty. SPEKTON polishes zero-expansion substrates into reference flats and inspection windows, verifies each one across its full aperture on an 18 inch interferometer, and ships it with the measurement record attached.
Where we're used
Reference & master flats
Zerodur and fused silica flats lapped and polished to sub-micron TTV, used as the dimensional reference against which stepper and inspection optics are calibrated.
Wafer inspection windows
High-transmission windows for high-speed wafer scanning heads, AR coated for the inspection wavelength and finished to nanometre-level surface roughness.
Beam-path mirrors
Dielectric and metallic HR mirrors on low-expansion substrates that keep beam pointing stable as the tool cycles through its thermal envelope.
Capabilities behind it
- Flat OpticsManufacturing to ISO 10110 standards for windows, mirrors, prisms, filters, and master flats requiring high flatness and sub-micron TTV precision, up to 500 mm diameter.
- Optical CoatingsIon-assisted deposition chambers, with a full spectral curve measured from VIS to LWIR for every batch.
- MetrologyA 100% quality control philosophy: 18 inch wide-aperture interferometry, 20 inch optical profilometry, CMM, and surface reference testing infrastructure.
Typical materials
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